DocumentCode :
2062537
Title :
90nm resolution reconstruction from a polychromatic signal using monochromatic phase retrieval techniques
Author :
Parsons, Aaron D. ; Chapman, Richard T. ; Mills, Benjamin ; Butcher, Thomas J. ; Frey, Jeremy G. ; Brocklesby, William S.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
fYear :
2011
fDate :
22-26 May 2011
Firstpage :
1
Lastpage :
1
Abstract :
The high harmonic source used in this work generates extreme UV harmonics of the laser fundamental, using high peak intensity (1014 W cm-2 ), 40 fs infrared laser pulses. A Mo/Si multilayer focussing mirror selects 3 main harmonics with 1.8% relative bandwidth, centred about the 29 (27 nm), and focuses them to a spot of 20 μm.
Keywords :
image reconstruction; information retrieval; infrared imaging; mirrors; monochromators; optical multilayers; optical pulse generation; UV harmonics; high peak intensity; infrared laser pulses; monochromatic phase retrieval techniques; polychromatic signal; resolution reconstruction; time 40 fs; wavelength 90 nm; Diffraction; Harmonic analysis; Image reconstruction; Image resolution; Microscopy; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
ISSN :
Pending
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
Type :
conf
DOI :
10.1109/CLEOE.2011.5942771
Filename :
5942771
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2062537
بازگشت