Arrays of nanofeatures in thin film materials by femtosecond laser light confinements with microspheres

We use laser light interaction with small spherical microparticles to deliver highly-localized light energy (also called photonic nanojets) inside thin-film materials. Taking benefit of the self-assembly properties of microspheres, we use the approach to obtain parallel and ordered laser machining of thin-films with sub wavelength resolution. Since femtosecond laser light is used, the proposed methodology can be applied to any materials (metals, semiconductors and dielectrics). We demonstrate the fabrication of 2D-photonic crystals and/or plasmonic arrays.