Mechanical sensitivity enhancement of silicon based photonic crystal micro-pressure sensor

Author

Bakhtazad, Aref ; Sabarinathan, Jayshri ; Hutter, Jeffrey L.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON, Canada

fYear

2010

fDate

25-27 Oct. 2010

Firstpage

1

Lastpage

5

Abstract

We describe here a sensor consisting of a line defect photonic crystal waveguide suspended over a silicon substrate. Under applied pressure, the photonic crystal waveguide is deflected toward the substrate, causing a decrease in optical transmission due to the coupling of the waveguide field to the silicon substrate. Bridge engineering can increase the mechanical sensitivity of the bridge: maintaining constant bridge footage, we are able to increase sensitivity by about 5.5 times.

Keywords

integrated optics; light transmission; micro-optics; microsensors; optical sensors; optical waveguides; photonic crystals; pressure sensors; Si; bridge engineering; bridge footage; line defect photonic crystal waveguide; mechanical sensitivity enhancement; micropressure sensor; optical transmission; silicon based photonic crystal; silicon substrate; waveguide field coupling; Bridges; Force; Optical sensors; Optical waveguides; Photonic crystals; Sensitivity; Silicon; pressure sensor; sensitivity; silicon; suspended bridge;

fLanguage

English

Publisher

ieee

Conference_Titel

Optomechatronic Technologies (ISOT), 2010 International Symposium on

Conference_Location

Toronto, ON

Print_ISBN

978-1-4244-7684-8

Type

conf

DOI

10.1109/ISOT.2010.5687322

Filename

5687322