Title :
Interferometry for picometer-level dimensional stability measurements
Author :
Voigt, D. ; Ellis, J.D. ; Verlaan, A.L. ; Bergmans, R.H. ; Spronck, J.W. ; Schmidt, R. H Munnig
Author_Institution :
VSL Dutch Metrol. Inst., Delft, Netherlands
Abstract :
The paper reports on the development of an optical heterodyne interferometer concept for the investigation of dimensional stability. The contactless, double sided optical scheme directly probes dimensional length changes of prismatic samples, whilst the balanced configuration provides common mode rejection of perturbations that act similarly on the measurement and the reference beam.
Keywords :
light interferometers; measurement uncertainty; spatial variables measurement; common mode rejection; contactless optical scheme; double sided optical scheme; optical heterodyne interferometer; picometer level dimensional stability measurements; reference beam; Optical refraction;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5942972
