DocumentCode
2067206
Title
VLSI design and fabrication for liquid crystal on silicon
Author
Underwood, Ian
Author_Institution
Dept. of Electron. & Electr. Eng., Edinburgh Univ., UK
fYear
2000
fDate
2000
Firstpage
42552
Lastpage
42557
Abstract
This paper attempts a very brief review of the principles of, and some recent advances in, the design and custom fabrication of silicon chips for use with liquid crystals in spatial light modulators and microdisplays
Keywords
spatial light modulators; CMOS active backplane; VLSI design; buffered SRAM pixel drive; custom fabrication; liquid crystal on silicon; microdisplays; planarisation; silicon chips; smart pixel; spatial light modulators;
fLanguage
English
Publisher
iet
Conference_Titel
Microdisplay and Smart Pixel Technologies (Ref. No. 2000/006), IEE Seminar on
Conference_Location
London
Type
conf
DOI
10.1049/ic:20000026
Filename
846980
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