Mechanical characterization of ultra-thin films by combining AFM nanoindentation tests and peridynamic simulations

In this study, the loading-unloading data obtained from the nono-indentation tests in combination with the peridynamic simulations are used to determine the elastic modulus and yield stress of the material. A simple search algorithm minimizing the difference between the predicted force- indentation depth and experiments leads to the determination of the material properties. Nano-indentation experiments are performed on both a soft polymer (polymethyldisiloxane (PDMS)) representative of the bulk dimensions, and a hard thin-film polymer (polystyrene (PS)) deposited on the bulk PDMS. Both the simulation and experimental results are validated by comparison against those previously published in the literature.