Title :
Adaptive run to run control for intermittent batch operations
Author :
Qin, Joe S. ; Scheid, Glen W. ; Riley, Terrence J.
Author_Institution :
Texas Univ., Austin, TX, USA
Abstract :
Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at Advanced Micro Devices (AMD). The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.
Keywords :
adaptive control; batch processing (industrial); computerised monitoring; integrated circuit manufacture; process control; rapid thermal annealing; AMD; AST SHS 2800 RTA system; Advanced Micro Devices; adaptive run-to-run controller; intermittent batch operations; manufacturing complexity; process reproducibility; rapid thermal annealing process; self-monitoring component; semiconductor manufacturing; Adaptive control; Control systems; Large scale integration; Manufacturing processes; Optimal control; Programmable control; Rapid thermal annealing; Rapid thermal processing; Reproducibility of results; Semiconductor device manufacture;
Conference_Titel :
American Control Conference, 2002. Proceedings of the 2002
Print_ISBN :
0-7803-7298-0
DOI :
10.1109/ACC.2002.1023958
