• DocumentCode
    2068006
  • Title

    Tutorial B: Introduction to optical metrology

  • Author

    Chan, Vincent ; Huang, Howard Yuanhao

  • fYear
    2010
  • fDate
    25-27 Oct. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this tutorial we will have a brief overview of the basic methods and applications of optical metrology. We will discuss its uses, limitations and how it is typically used in industry. The following topics will be covered: · Background theory · Types of measurements · GD & T · Types of sensors · Limitations of optical measurements · Industrial applications This tutorial is best suited to engineers new to optical metrology.
  • Keywords
    optical sensors; reviews; industrial application; optical metrology; optical sensors; tutorial;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optomechatronic Technologies (ISOT), 2010 International Symposium on
  • Conference_Location
    Toronto, ON
  • Print_ISBN
    978-1-4244-7684-8
  • Type

    conf

  • DOI
    10.1109/ISOT.2010.5687377
  • Filename
    5687377
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2068006