Particularities of signals formation in microwave microscopy

The problems connected with the estimation of the semiconductors´ physical parameters microwave microscopy limiting particularities are considered. Attention is paid to the existence of the background action of the sample on the signals of the measuring information absent in the tunnel microscopy. Dependence of its value on the geometry of the microprobe inoperative part and macro irregularities degree in the whole sensor aperture is estimated quantitatively.