Automation structure of a semiconductor fab using factory communications

Author

Westphal, Heinz ; Gramlich, Stephan

Author_Institution

Magdeburg Univ., Germany

Volume

1

fYear

1998

fDate

31 Aug-4 Sep 1998

Firstpage

160

Abstract

The paper introduces the FAB 30 automation structure of a semiconductor fabrication (fab) using factory communications. The Fab 30 project consists of the Fab 30 wafer fabrication facility and the design center from the AMD Saxony Manufacturing GmbH. The paper briefly introduces the work. A sketch of a semiconductor manufacturing execution system (MES) is given and the principal functional strategy of a MES is shown. An automated material handling system (AMHS) is introduced, and finally, the design of the FAB 30 is briefly shown

Keywords

electronics industry; industrial control; materials handling; semiconductor device manufacture; AMD Saxony Manufacturing; FAB 30 automation structure; Fab 30 wafer fabrication facility; ISO 9000; MES functional strategy; automated material handling system; automation structure; design center; equipment interface; factory communications; semiconductor fabrication; semiconductor manufacturing execution system; Automatic control; Condition monitoring; Control systems; Design engineering; Fabrication; Manufacturing automation; Materials handling; Performance analysis; Production facilities; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics Society, 1998. IECON '98. Proceedings of the 24th Annual Conference of the IEEE

Conference_Location

Aachen

Print_ISBN

0-7803-4503-7

Type

conf

DOI

10.1109/IECON.1998.723964

Filename

723964