Title :
A Mini-FAB simulation model comparing FIFO and MIVP(R) schedule policies (outer loop), and PID and H∞ machine controllers (inner loop) for semiconductor diffusion bay maintenance
Author :
Flores-Godoy, José-Job ; Wang, Yan ; Collins, Donald W. ; Hoppensteadt, Frank ; Tsakalis, Kostas
Author_Institution :
Coll. of Eng. & Appl. Sci., Arizona State Univ., Tempe, AZ, USA
fDate :
31 Aug-4 Sep 1998
Abstract :
This Multiscale Integration of Manufacturing and Assembly Processes (MIMAP) demonstration project investigates the integration of two or more Thrust Area Groups (TAGs) by creating a flow of information and processes from two areas of research. The control theory research of two different controllers for diffusion furnaces used in semiconductor manufacturing which predict a specific window of machine failure, the mean-time-before-failure (MTBF). The objective is to increase yield, decrease cycle time, work-in-progress (WIP) and production costs. A global factory Minimum Inventory Variability Scheduling policy (MIVP(R)), used to decrease cycle time and cycle time variance when compared to a first-in-first-out (FIFO) scheduling policy, was used to make the comparisons between the two inner and outer loop controllers. The project´s Cross Cutting Methodologies (CCMs) is ensured by the participation of faculty from three different colleges (LAS, CEAS, and CTAS) and two electrical engineering doctoral students
Keywords :
H∞ control; manufacturing processes; process control; three-term control; Cross Cutting Methodologies; H∞ machine controllers; MIMAP demonstration project; MTBF; Mini-FAB simulation model; Minimum Inventory Variability Scheduling policy; PID manufacturing process control; Thrust Area Groups; cycle time; first-in-first-out scheduling policy; mean-time-before-failure; semiconductor manufacturing; Assembly; Control theory; Costs; Educational institutions; Electrical engineering; Furnaces; Job shop scheduling; Manufacturing processes; Production facilities; Semiconductor device manufacture;
Conference_Titel :
Industrial Electronics Society, 1998. IECON '98. Proceedings of the 24th Annual Conference of the IEEE
Conference_Location :
Aachen
Print_ISBN :
0-7803-4503-7
DOI :
10.1109/IECON.1998.724006