Title :
Micromachined acoustic device for diagnostic applications
Author :
Pantazis, Alexandros K. ; Gizeli, Electra ; Konstantinidis, Georgios
Author_Institution :
Biol. Dept., Univ. of Crete, Heraklion, Greece
Abstract :
Monolithic integrated lab-on-a-chip systems are gaining more and more attention. The ability of having everything on a single chip allows for miniaturization and flexibility. However, some of the currently applied devices are based on materials non-compatible with semiconductor processing techniques; in this paper, a micromachined device based on a high-quality semiconductor material is presented and evaluated for its potential to diagnostics.
Keywords :
III-V semiconductors; bioMEMS; bioacoustics; gallium compounds; lab-on-a-chip; patient diagnosis; semiconductor materials; GaN; diagnostic applications; high-quality semiconductor material; micromachined acoustic device; monolithic integrated lab-on-a-chip systems; semiconductor processing; Drugs; Epitaxial growth; Polymers;
Conference_Titel :
Information Technology and Applications in Biomedicine (ITAB), 2010 10th IEEE International Conference on
Conference_Location :
Corfu
Print_ISBN :
978-1-4244-6559-0
DOI :
10.1109/ITAB.2010.5687626
