Title :
High-frequency characterization and modeling of polysilicon and diffusion lines
Author :
Eisenstadt, William R. ; Bell, Orlando
Author_Institution :
Dept. of Electr. Eng., Florida Univ., Gainesville, FL, USA
Abstract :
Polysilicon interconnect high-frequency measurements (45 MHz to 2 GHz) and SPICE-based transmission-line modeling have been performed on CMOS IC test structures. The methodology consists of the following steps: (1) customized transmission-line layout for microwave coplanar probe-based test; (2) calibration of probe reference plane using the ISS (impedance-standard substrate) standard and the LRM (line-reflect-match) calibration technique; (3) calibration of silicon substrate pad-parasitics; (4) S-parameter measurement of transmission lines and subtraction of system and substrate parasitics; and (5) SPICE circuit model extraction and parameter optimization. Results from ongoing measurements of diffusion lines are also reported
Keywords :
CMOS integrated circuits; S-parameters; calibration; elemental semiconductors; equivalent circuits; frequency response; integrated circuit testing; microwave measurement; semiconductor device models; silicon; transmission line theory; 45 MHz to 2 GHz; CMOS IC test structures; HF characterisation; ISS standard; LRM technique; S-parameter measurement; SPICE circuit model extraction; calibration; customized transmission-line layout; diffusion lines; high-frequency measurements; impedance-standard substrate; line-reflect-match; microwave coplanar probe-based test; parameter optimization; polycrystalline Si; polysilicon interconnects; probe reference plane; substrate pad-parasitics; transmission-line modeling; CMOS integrated circuits; Calibration; Circuit testing; Integrated circuit interconnections; Integrated circuit modeling; Integrated circuit testing; Performance evaluation; Semiconductor device modeling; Transmission line measurements; Transmission lines;
Conference_Titel :
Custom Integrated Circuits Conference, 1991., Proceedings of the IEEE 1991
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0015-7
DOI :
10.1109/CICC.1991.164042
