Title :
W-band tunable reflective type phase shifter based on waveguide-mounted RF MEMS
Author :
Psychogiou, D. ; Hesselbarth, J. ; Li, Y. ; Kuehne, S. ; Hierold, C.
Author_Institution :
Lab. for Electromagn. Fields & Microwave Electron. (IFH), ETH Zurich, Zurich, Switzerland
Abstract :
A novel concept for a continuously variable W-band phase shifter is proposed. It is based on a ridge waveguide resonator tuned by MEMS-actuated conductive fingers that interact with the fields beneath the ridge. The rotation of anti-parallel oriented MEMS conductive fingers of about half wavelength size realize a distributed interaction with the purposely structured waveguide ridge. In such a way, large transmission phase variations are obtained. By cascading an additional resonator and a waveguide short, a reflection type phase shifter is created with a single MEMS. For MEMS finger deflection angles between 0° and 7.5°, this device realizes reflection phase shift variation of 381° and a reflection coefficient magnitude of better than -1.65 dB at a frequency of 106.5 GHz. This corresponds to a figure of merit of 230°/dB.
Keywords :
micromechanical resonators; microwave phase shifters; microwave resonators; ridge waveguides; MEMS-actuated conductive finger; W-band tunable reflective type phase shifter; antiparallel oriented MEMS conductive finger; continuously variable W-band phase shifter; phase variation; reflection type phase shifter; ridge waveguide resonator; waveguide-mounted RF MEMS; wavelength size; Fingers; Micromechanical devices; Optical waveguides; Phase shifters; Radio frequency; Reflection; RF MEMS; millimeter-wave phase shifter; tunable resonator;
Conference_Titel :
Microwave Workshop Series on Millimeter Wave Integration Technologies (IMWS), 2011 IEEE MTT-S International
Conference_Location :
Sitges
Print_ISBN :
978-1-61284-963-8
DOI :
10.1109/IMWS3.2011.6061894
