Analysis and design of MEMS capacitive switch for microwave distributed phase shifter

Author

He, Xun-jun ; Wu, Qun ; Tang, Kai ; Wang, Yue ; Zhu, Huai Cheng ; Xu, Ying

Author_Institution

Sch. of Electron. & Inf. Technol., Harbin Inst. of Technol., Harbin

fYear

2008

fDate

19-23 May 2008

Firstpage

746

Lastpage

749

Abstract

A novel low-driven MEMS capacitive switch structure for microwave distributed phase shifter is presented based on the analysis of the operation principle. The driven voltage, response time, release time and vibration modes of the capacitive switch are analyzed using the Intellisuitetrade software. The simulation results show the driven voltage of 2.5 V, the response time less than 30 us, the release time high than 40 us and vibration frequency high than 15 KHz. The microwave distributed phase shifter based on the novel MEMS capacitive switch structure takes on superior electromechanical performance and rapid response time by comparing with other phase shifters based on the common MEMS beam structure switches.

Keywords

micromechanical devices; microswitches; phase shifters; MEMS capacitive switch; microwave distributed phase shifter; voltage 2.5 V; Beams; Delay; Electromagnetic compatibility; Frequency; Micromechanical devices; Phase shifters; Switches; Time factors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electromagnetic Compatibility and 19th International Zurich Symposium on Electromagnetic Compatibility, 2008. APEMC 2008. Asia-Pacific Symposium on

Conference_Location

Singapore

Print_ISBN

978-981-08-0629-3

Electronic_ISBN

978-981-08-0629-3

Type

conf

DOI

10.1109/APEMC.2008.4559983

Filename

4559983