Title :
Nanostructured origami
Author :
Jurga, Stanley M. ; Hidrovo, Carlos H. ; Niemczura, Johnathan ; Smith, Henry I. ; Barbastathis, George
Author_Institution :
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We present a method to manufacture three-dimensional (3D) nanostructures by folding 2D nanopatterned membranes. The manufacturing process consists of two steps. During the first step, 2D nanopatterning on the membrane takes place, including the definition of the folding apparatus, such as creases and actuators. Subsequently, a "folding sequence" is initiated, resulting in the nanostructures taking their desired configuration in 3D space in the final folded structure. We present in detail a simple case study, including the design, modeling, fabrication and testing of a single folding silicon segment with gold hinges. We have achieved folding rotation up to 180 degrees with ∼20 msec actuation time and alignment better than 10 μm.
Keywords :
biomembranes; elemental semiconductors; nanostructured materials; nanotechnology; silicon; 20 ms; 2D nanopatterned membranes; Si; actuators; creases; folded structure; gold hinges; nanostructured origami; silicon segment modeling; single folding silicon segment designing; three-dimensional nanostructures; Actuators; Biomembranes; Fabrication; Fasteners; Gold; Manufacturing processes; Nanopatterning; Nanostructures; Silicon; Testing;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1231755
