Nanostructured origami

Author

Jurga, Stanley M. ; Hidrovo, Carlos H. ; Niemczura, Johnathan ; Smith, Henry I. ; Barbastathis, George

Author_Institution

Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

1

fYear

2003

fDate

12-14 Aug. 2003

Firstpage

220

Abstract

We present a method to manufacture three-dimensional (3D) nanostructures by folding 2D nanopatterned membranes. The manufacturing process consists of two steps. During the first step, 2D nanopatterning on the membrane takes place, including the definition of the folding apparatus, such as creases and actuators. Subsequently, a "folding sequence" is initiated, resulting in the nanostructures taking their desired configuration in 3D space in the final folded structure. We present in detail a simple case study, including the design, modeling, fabrication and testing of a single folding silicon segment with gold hinges. We have achieved folding rotation up to 180 degrees with ∼20 msec actuation time and alignment better than 10 μm.

Keywords

biomembranes; elemental semiconductors; nanostructured materials; nanotechnology; silicon; 20 ms; 2D nanopatterned membranes; Si; actuators; creases; folded structure; gold hinges; nanostructured origami; silicon segment modeling; single folding silicon segment designing; three-dimensional nanostructures; Actuators; Biomembranes; Fabrication; Fasteners; Gold; Manufacturing processes; Nanopatterning; Nanostructures; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on

Print_ISBN

0-7803-7976-4

Type

conf

DOI

10.1109/NANO.2003.1231755

Filename

1231755