Performance evaluation of micromechanical binary phase-only holographic optical elements

This paper presents some results of our development and test efforts in micromachined design for optical modulation. In this work, we have developed, using a readily available surface micromachining fabrication process (MUMPs), a series of arrayed micromirror elements. These element arrays form phase-mostly spatial light modulators (SLMs), similar to Texas Instruments´ flexure beam micromirror device (FBMD). Characteristics that distinguish our elements from those of TI include: integrated support posts to stabilize the elements at points beyond pull-in potential, non-metallic supporting structures to reduce diffractive noise, bistable drive capabilities without the need for transistor arrays, and greater mirror surface stability. Firstly, our elements electromechanically bistable MEMS pistons (EmBMPs), are described and their arrayed operation is discussed. Optical evaluations measure the feasibility of these devices in the application of optical interconnections