Fabrication of single multi-walled carbon nanotube array with a composite electric field guided assembly method

This paper describes a mass producible process for integrating single MWCNTs into an array device. It was demonstrated that MWCNTs were individually deposited across an array of gaps by the composite electric field-guided assembly method using an ac electric field combined with a dc electric field. Single MWCNTs were simultaneously deposited on an array of 6 pairs of electrodes and separated by further lithography process. The proposed approach opens up the new possibilities for the mass production of CNT-based NEMS/MEMS devices.