Title :
A coupled circuit and device simulator for design of RF MEMS VCOs
Author :
Behera, Manas ; De, Sudipto ; Aluru, Narayan ; Mayaram, Kartikeya
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Abstract :
A new coupled circuit and electrostatic/mechanical simulator is presented for the design of RF MEMS VCOs. The numerical solution of device level equations is used to accurately compute the capacitance of the MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. Simulations of a 2.4 GHz VCO implemented in a UP 0.5 μm CMOS technology show good agreement with experimentally observed behavior.
Keywords :
coupled circuits; micromechanical devices; voltage-controlled oscillators; 0.5 micron; 2.4 GHz; CMOS technology; HP techniques; MEMS capacitor; RF MEMS VCO; coupled circuit; device simulator; electrostatic simulator; mechanical simulator; numerical solution; CMOS technology; Capacitance; Capacitors; Circuit simulation; Computational modeling; Coupling circuits; Electrostatics; Equations; Micromechanical devices; Radiofrequency microelectromechanical systems;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1231789
