Accurate modeling of thin-film inductance for nano-chip

We have modeled thin-film inductance using a novel approach called "Improved Analytical Model Approximation of Self-Inductance of Rectangular Thin-Film (IAMASRT)". It is an on-chip inductance modeling method modified for thin-film rectangular interconnects. Various field solver models produce correct results for interconnect inductance but are extremely time consuming. It is imperative to develop methods to model inductance fast and accurate for reliable circuit design. We improved the method to model interconnect inductance for thin metal films. The old method was aggressive in assuming that errors will be insignificant if any interconnect is modeled as interconnect with circular cross-section. We derived equation for inductance of thin-film metallic interconnects of rectangular shape and compare the inductance values of old model AMAS and the proposed new technique. Self-inductance values derived for thin-film rectangular interconnects show steady trend of increasing error in the old AMAS method for smaller size of interconnect.