• DocumentCode
    2074752
  • Title

    Dry-film technology as a standard process for passive optical alignment of Silicon Photonics Devices

  • Author

    Kopp, Christophe ; Bernabé, Stéphane ; Philippe, Paul

  • Author_Institution
    LETI, CEA, Grenoble
  • fYear
    2009
  • fDate
    26-29 May 2009
  • Firstpage
    1914
  • Lastpage
    1919
  • Abstract
    Packaging of optoelectronic devices has always been a bottleneck for mass production. Today, it is still the case for silicon photonics devices. Intrinsically, the technology of silicon nanowires integrated onto SOI electronic integrated circuits allows the same kind of cost reduction as the one encountered in the microelectronic industry. However, smart solutions have to be proposed in order not to lose this benefit because of the use of non suitable packaging architectures. In this paper, we present a low-cost, mass production compatible and easy-to-transfer technique that allows optical fibers to be passively aligned in front of silicon photonics devices´ optical I/Os. This technique is based on the use of dry-film structures that enable optical fibers to be positioned with accuracy below 5 mum. Combined with optical input like photodiodes or with I/Os made of vertical grating coupler, this approach is a promising one for achieving future low cost integrated optical devices. Moreover, the concept could be extended to multichannel devices used for parallel optics links.
  • Keywords
    electronics packaging; elemental semiconductors; integrated optoelectronics; mass production; nanoelectronics; nanophotonics; nanowires; optical fibres; silicon; silicon compounds; silicon-on-insulator; SOI electronic integrated circuit integration; Si; Si-SiO2; dry-film technology; mass production; microelectronic industry; optical I/O; optoelectronic device packaging; parallel optics link; passive optical fiber alignment; photodiode; silicon nanowire technology; silicon photonic device; vertical grating coupler; Costs; Electronics packaging; Integrated circuit packaging; Integrated circuit technology; Mass production; Optical devices; Optical fibers; Optoelectronic devices; Photonics; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4244-4475-5
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2009.5074281
  • Filename
    5074281