DocumentCode
2074752
Title
Dry-film technology as a standard process for passive optical alignment of Silicon Photonics Devices
Author
Kopp, Christophe ; Bernabé, Stéphane ; Philippe, Paul
Author_Institution
LETI, CEA, Grenoble
fYear
2009
fDate
26-29 May 2009
Firstpage
1914
Lastpage
1919
Abstract
Packaging of optoelectronic devices has always been a bottleneck for mass production. Today, it is still the case for silicon photonics devices. Intrinsically, the technology of silicon nanowires integrated onto SOI electronic integrated circuits allows the same kind of cost reduction as the one encountered in the microelectronic industry. However, smart solutions have to be proposed in order not to lose this benefit because of the use of non suitable packaging architectures. In this paper, we present a low-cost, mass production compatible and easy-to-transfer technique that allows optical fibers to be passively aligned in front of silicon photonics devices´ optical I/Os. This technique is based on the use of dry-film structures that enable optical fibers to be positioned with accuracy below 5 mum. Combined with optical input like photodiodes or with I/Os made of vertical grating coupler, this approach is a promising one for achieving future low cost integrated optical devices. Moreover, the concept could be extended to multichannel devices used for parallel optics links.
Keywords
electronics packaging; elemental semiconductors; integrated optoelectronics; mass production; nanoelectronics; nanophotonics; nanowires; optical fibres; silicon; silicon compounds; silicon-on-insulator; SOI electronic integrated circuit integration; Si; Si-SiO2; dry-film technology; mass production; microelectronic industry; optical I/O; optoelectronic device packaging; parallel optics link; passive optical fiber alignment; photodiode; silicon nanowire technology; silicon photonic device; vertical grating coupler; Costs; Electronics packaging; Integrated circuit packaging; Integrated circuit technology; Mass production; Optical devices; Optical fibers; Optoelectronic devices; Photonics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
978-1-4244-4475-5
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2009.5074281
Filename
5074281
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