Title :
Micromachining of lateral field emission devices
Author :
Milanovic, V. ; Teasdale, D.A. ; Doherty, L. ; Parsa, S. ; Chen Zhang ; Pister, K.S.J.
Author_Institution :
Univ. of California, Berkeley, CA, USA
Abstract :
The authors demonstrate a range of applications of micromachining and micromechanical systems in achieving efficient and tunable field emission devices, and improving their ease of integration.
Keywords :
electron field emission; micromachining; microwave devices; lateral field emission devices; micromachining; micromechanical systems; tunable field emission devices; Actuators; Diodes; Electrodes; Etching; Fabrication; Micromachining; Micromechanical devices; Oxidation; Vacuum technology; Voltage;
Conference_Titel :
Vacuum Electronics Conference, 2000. Abstracts. International
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5987-9
DOI :
10.1109/OVE:EC.2000.847467
