Title :
Tilting metal micro-needle fabrication based on optical vortex laser ablation
Author :
Toyoda, Kohei ; Miyamoto, Katsuhiko ; Okida, Masahito ; Morita, Ryuji ; Omatsu, Takashige
Author_Institution :
Grad. Sch. of Adv. Integration Sci., Chiba Univ., Chiba, Japan
Abstract :
In this paper, we extend our previous vortex laser ablation technique to fabricate a microneedle tilting to the direction of incident vorex pulses.
Keywords :
laser ablation; microfabrication; optical vortices; optical vortex laser ablation; tilting metal microneedle fabrication; Metals;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5943337
