DocumentCode
2075762
Title
Tilting metal micro-needle fabrication based on optical vortex laser ablation
Author
Toyoda, Kohei ; Miyamoto, Katsuhiko ; Okida, Masahito ; Morita, Ryuji ; Omatsu, Takashige
Author_Institution
Grad. Sch. of Adv. Integration Sci., Chiba Univ., Chiba, Japan
fYear
2011
fDate
22-26 May 2011
Firstpage
1
Lastpage
1
Abstract
In this paper, we extend our previous vortex laser ablation technique to fabricate a microneedle tilting to the direction of incident vorex pulses.
Keywords
laser ablation; microfabrication; optical vortices; optical vortex laser ablation; tilting metal microneedle fabrication; Metals;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location
Munich
ISSN
Pending
Print_ISBN
978-1-4577-0533-5
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/CLEOE.2011.5943337
Filename
5943337
Link To Document