DocumentCode
2075805
Title
Nanofabrication with pulsed lasers
Author
Kabashin, A.V. ; Grojo, D. ; Sarnet, Th ; Delaporte, Ph. ; Blandin, P. ; Charmasson, L. ; Torres, R. ; Derrien, Th ; Sentis, M.
Author_Institution
Lab. LP3, Univ. de Mediterranee, Marseille, France
fYear
2011
fDate
22-26 May 2011
Firstpage
1
Lastpage
1
Abstract
The employment of pulsed lasers offers a novel unique tool for nanofabrication. When focused on the surface of a solid target, pulsed laser radiation causes a variety of phenomena, including heating, melting, and finally ablation of the target, and such processes can lead to an efficient material nanostructuring.
Keywords
laser materials processing; nanofabrication; nanophotonics; nanostructured materials; optical pulse generation; material nanostructuring; nanofabrication; pulsed laser radiation; solid target surface; Electric breakdown; Laser ablation;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location
Munich
ISSN
Pending
Print_ISBN
978-1-4577-0533-5
Electronic_ISBN
Pending
Type
conf
DOI
10.1109/CLEOE.2011.5943339
Filename
5943339
Link To Document