Laser nanofabrication: Applications in micro-optics, micro-electronics, micromachines, and microfluidics

Femtosecond laser micronanofabrication has been considered as a promising approach for complicated device fabrication in versatile fields due to its intrinsic three-dimensional (3D) prototyping capability and reasonably high fabrication accuracy up to tens of nanometers. However, the unique features haven´t been fully demonstrated yet so far. Our research in the passed several years has been focused in exploring applications of delicate technology in micro-optics, microelectronics, micromachines and microfluidics. Significant progress has been achieved. Successful examples include but not limited to aspheric microlens arrays with 100% filling ratio and numerical aperture as high as 0.5, nonplanar metal nanowiring technology, flexible circuits of graphene, remotely magnetically controllable micromachine, and microfilter and microturbines for microfluidic channels. Details on the fabrication and characterizations on these devices will be presented.