DocumentCode
2075888
Title
A complex neutralization of gaseous blending containg UF6 and BRF3
Author
Zimin, B.M. ; Rudnikov, A.I. ; Torgunakov, Ju.B. ; Amelina, G.N. ; Gordienko, V.V. ; Jerin, I.I. ; Usov, V.F.
Author_Institution
Tomsk Politechnical University
Volume
2
fYear
2001
fDate
26 Jun-3 Jul 2001
Firstpage
154
Lastpage
157
Keywords
Aluminum; Chemical products; Chemistry; Electromagnetic wave absorption; Equations; Gases; Hafnium; Kinetic theory; Solids; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2001. KORUS '01. Proceedings. The Fifth Russian-Korean International Symposium on
Print_ISBN
0-7803-7008-2
Type
conf
DOI
10.1109/KORUS.2001.975211
Filename
975211
Link To Document