DocumentCode
2076055
Title
A construction and circuitry realization of the combined pressure-temperature sensor based on the shear piezoresistive effect
Author
Limorev, Artem V. ; Gridchin, Alexander V.
Author_Institution
Novosibirsk State Tech. Univ., Russia
Volume
1
fYear
2002
fDate
1-5 July 2002
Abstract
The construction and circuitry realization of the combined pressure-temperature sensor based on the shear piezoresistive effect (SPE) are developed and presented in this paper. The four-terminal silicon transducer (FTT) is used as main sensitive element. The construction of the sensor allows making the adequate measuring of the blood pressure, body temperature and pulse. The circuit of this sensor allows measuring these parameters with good accuracy. The digital output provides the comfort for patient and operator.
Keywords
blood pressure measurement; piezoresistance; pressure sensors; silicon; temperature sensors; blood pressure measurement; body temperature measurement; circuitry realization; digital indicator; four-terminal silicon transducer; pressure-temperature sensor; pulse measurement; sensitive element; shear piezoresistive effect; Bridge circuits; Piezoresistance; Pulse measurements; Sensor phenomena and characterization; Silicon; Stress; Surface resistance; Temperature sensors; Topology; Water heating;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN
5-7782-0380-2
Type
conf
DOI
10.1109/SREDM.2002.1024324
Filename
1024324
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