Title :
Surface structuring of ZnO wafers with femtosecond laser pulses: From laser-induced periodic surface structures to doping
Author :
Dev, A. ; Schneider, A. ; Sebald, K. ; Voss, T.
Author_Institution :
Inst. of Solid State Phys., Univ. of Bremen, Bremen, Germany
Abstract :
We investigated surface-structuring and doping of ZnO wafers using the output pulses of a regeneratively amplified Titanium-Sapphire laser (2 mJ, 1 kHz, 100 fs, 800 nm). The wide bandgap semiconductor ZnO is frequently used for UV photodetection, optoelectronic and sensing applications.
Keywords :
II-VI semiconductors; laser beam effects; laser materials processing; optical pulse generation; semiconductor doping; solid lasers; zinc compounds; UV photodetection; ZnO wafers; doping; energy 2 mJ; femtosecond laser pulses; frequency 1 kHz; laser induced periodic surface structures; optoelectronic applications; output pulses; sensing applications; surface structuring; time 100 fs; titanium sapphire laser; wavelength 800 nm; wide bandgap semiconductor; Doping; Laser theory; Periodic structures; Surface emitting lasers; Ultrafast optics; Zinc oxide;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5943355
