• DocumentCode
    2080466
  • Title

    Nanostructure imaging with sub-THz coherent acoustic phonon pulses

  • Author

    Daly, B.C. ; Holme, N.C.R. ; Branciard, C. ; Norris, Theodore B. ; Pau, S. ; Tennant, D.M. ; Taylor, J.A. ; Bower, J.E.

  • Author_Institution
    Center for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI
  • fYear
    2004
  • fDate
    21-21 May 2004
  • Firstpage
    135
  • Lastpage
    136
  • Abstract
    We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown
  • Keywords
    aluminium; etching; high-speed optical techniques; lithography; nanostructured materials; phonons; submillimetre wave imaging; ultrasonic measurement; Al; Si; Si substrate; Sub-micron resolution images; acoustic phonon pulses; coherent phonon pulses; lithographically etched aluminum; nanostructure imaging; picosecond ultrasonics; sub-THz phonon pulses; ultrafast optical methods;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference, 2004. (IQEC). International
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    1-55752-778-4
  • Type

    conf

  • Filename
    1366680
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2080466