• DocumentCode
    2080724
  • Title

    Simulation of a nobel porous Si based cantilever beam CA 15-3 protein sensor

  • Author

    Gharaei, H. ; Nikfarjam, A. ; Mohamadnejad, J. ; Saniei, F.

  • fYear
    2013
  • fDate
    13-15 Feb. 2013
  • Firstpage
    178
  • Lastpage
    182
  • Abstract
    In this paper a cantilever beam Bio-sensor based on porous Si has been simulated. Adding the mass of a CA 15-3 protein to the mass of the cantilever beam can make a frequency shift, which is used for the measurement. Here a sensitivity of S = 4.896×107 Hz/μg for detection CA 15-3 protein with mass of m = 4.982×10-10 ng has been achieved. Having the surface of the sensor porous let us make sensors with such sensitivities. Porous cantilever beam caused the sensitivity and the bandwidth of the biosensor increase, and saturation takes place at higher number of CA 15-3 proteins absorbed. Besides porous sensor showed lower threshold.
  • Keywords
    biomedical transducers; biosensors; cantilevers; elemental semiconductors; mass measurement; proteins; silicon; tumours; Si; human tumor mucin; mass measurement; porous Si based cantilever beam CA 15-3 protein biosensor; sensor porous surface; Finite element analysis; Gold; Silicon; Bio Sensor; Cantilever Beam; Porous Si;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Mechatronics (ICRoM), 2013 First RSI/ISM International Conference on
  • Conference_Location
    Tehran
  • Print_ISBN
    978-1-4673-5809-5
  • Type

    conf

  • DOI
    10.1109/ICRoM.2013.6510101
  • Filename
    6510101