DocumentCode
2080959
Title
Optical reflective filter with comb-drive nickel micromirror for optical fiber communication
Author
Akimoto, Koji ; Uenishi, Yuji ; Honma, Kazuharu ; Nagaoka, Shinji
Author_Institution
NTT Opto-Electron. Labs., Tokyo, Japan
fYear
1997
fDate
18-21 May 1997
Firstpage
614
Lastpage
619
Abstract
A novel nickel micromirror with an electrostatic comb-drive actuator has been developed. It is fabricated by nickel surface micromachining, which features a thick photoresist molding process and nickel electroplating. It has a precise controllability and a wide tuning range. As an example of an application to optical communications, an optical reflective filter, which is an etalon constructed of a flat-end optical fiber facet and the micromirror, is demonstrated
Keywords
micromachining; mirrors; nickel; optical fibre communication; optical fibre filters; Ni; controllability; electroplating; electrostatic comb-drive actuator; etalon; fabrication; nickel micromirror; optical fiber communication; optical reflective filter; photoresist molding; surface micromachining; tuning range; Controllability; Electrostatic actuators; Micromachining; Micromirrors; Nickel; Optical fiber communication; Optical fiber filters; Optical filters; Optical tuning; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1997. Proceedings., 47th
Conference_Location
San Jose, CA
ISSN
0569-5503
Print_ISBN
0-7803-3857-X
Type
conf
DOI
10.1109/ECTC.1997.606234
Filename
606234
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