Title :
Modelling and compensation of quadrature error for silicon MEMS microgyroscope
Author :
Yeh, Bao Y. ; Liang, Yung C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures and compensation circuit to draw the fin back to the balanced position (equal gap between the upper and lower capacitor banks). Quadrature error is a major concern in a microgyroscope for low-rate sensing, e.g. a few degrees per hour.
Keywords :
capacitors; compensation; error analysis; gyroscopes; micromechanical devices; Z-axis vibratory rate microgyroscope; aerospace systems; asymmetric spring flexures; balanced position; compensation; compensation circuit; electrostatic force; fin; lower capacitor banks; mathematical modelling; micro-electro-mechanical structure; quadrature error; silicon MEMS microgyroscope; upper capacitor banks; weapons systems; Acceleration; Accelerometers; Capacitance; Capacitors; Computer errors; Gyroscopes; Mathematical model; Micromechanical devices; Silicon; Springs;
Conference_Titel :
Power Electronics and Drive Systems, 2001. Proceedings., 2001 4th IEEE International Conference on
Print_ISBN :
0-7803-7233-6
DOI :
10.1109/PEDS.2001.975434
