DocumentCode
2081188
Title
Modelling and compensation of quadrature error for silicon MEMS microgyroscope
Author
Yeh, Bao Y. ; Liang, Yung C.
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Volume
2
fYear
2001
fDate
22-25 Oct. 2001
Firstpage
871
Abstract
This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures and compensation circuit to draw the fin back to the balanced position (equal gap between the upper and lower capacitor banks). Quadrature error is a major concern in a microgyroscope for low-rate sensing, e.g. a few degrees per hour.
Keywords
capacitors; compensation; error analysis; gyroscopes; micromechanical devices; Z-axis vibratory rate microgyroscope; aerospace systems; asymmetric spring flexures; balanced position; compensation; compensation circuit; electrostatic force; fin; lower capacitor banks; mathematical modelling; micro-electro-mechanical structure; quadrature error; silicon MEMS microgyroscope; upper capacitor banks; weapons systems; Acceleration; Accelerometers; Capacitance; Capacitors; Computer errors; Gyroscopes; Mathematical model; Micromechanical devices; Silicon; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Electronics and Drive Systems, 2001. Proceedings., 2001 4th IEEE International Conference on
Print_ISBN
0-7803-7233-6
Type
conf
DOI
10.1109/PEDS.2001.975434
Filename
975434
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