Development of a Precision Parallel Micro-mechanism for Nano Tele-operation

There is an urgent demand for nano level tele-operating system to carry out three-dimensional high-speed micro manipulations for medical and biotechnological applications. In this paper, we designed a precision parallel micro-mechanism driven by piezo actuators (PZT) as the operating robot with 6 DOF, a movement range of 20 mum, and a resolution of less than 20 nm. Also, we presented the conceptual design, synthesis, control strategy, and evaluation for the precision parallel micro-mechanism. The experimental results indicate that the developed parallel micro-mechanism can be used to manipulate micro-objects at high speed and with high precision.