Title :
Multilayer electroformed devices on silicon substrates
Author :
Holmes, A.S. ; Lee, K.W.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Abstract :
A simple, low-temperature UV electroforming process has been described which is capable of producing multi-level nickel devices on silicon substrates. The process has been used to realise two-axis electrostatic resonators, in which resonant excitation and electrothermal tuning have been demonstrated
Keywords :
electroforming; Si; electrothermal tuning; low-temperature UV electroforming process; multilayer electroformed devices; resonant excitation; two-axis electrostatic resonators;
Conference_Titel :
Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on
Conference_Location :
Birmingham
DOI :
10.1049/ic:20000185
