• DocumentCode
    2086799
  • Title

    Optimized Cu Pillar Bump flip chip package design for ultralow k device application

  • Author

    Chien-Te Feng ; Hsu, Meng-Kai ; Hsu, S.C. ; Chang, Wenge ; Su, Shih-Tang

  • Author_Institution
    Marcrotech Technol. Inc., Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    Feb. 27 2013-March 1 2013
  • Firstpage
    15
  • Lastpage
    24
  • Abstract
    The demand for Cu Pillar Bump (CPB) has been significantly increased due to the fine pitch, high bandwidth, and high thermal performance requirement. However, the Cu pillar also has its own defect for the high peeling stress on the low K layer compare to the eutectic solder bump. To overcome the high peeling stress defect, optimize the CPB design is very important. This paper has three major topics using simulation results to analyze the silicon surface peeling stress. 1. The bump structure optimization, with the Cu pillar adhesion force on different material layers. 2. The solder joint condition impact. 3. The substrate material selection. Each topic has multiple design factors, with the CAE (Computer Aid Engineering) simulation result, the maximum silicon surface peeling stress point can be predicted, the bump and substrate structure can be optimized.
  • Keywords
    adhesion; copper; elemental semiconductors; flip-chip devices; silicon; solders; thermal management (packaging); CAE; CPB design; Cu pillar adhesion force; Cu pillar bump; bump structure optimization; computer aid engineering; eutectic solder bump; flip chip package; silicon surface peeling stress; solder joint condition impact; substrate material selection; thermal performance; ultra low k device; Abstracts; Aluminum; Silicon compounds; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Packaging Materials (APM), 2013 IEEE International Symposium on
  • Conference_Location
    Irvine, CA
  • ISSN
    1550-5723
  • Print_ISBN
    978-1-4673-6093-7
  • Electronic_ISBN
    1550-5723
  • Type

    conf

  • DOI
    10.1109/ISAPM.2013.6510384
  • Filename
    6510384