DocumentCode
2086799
Title
Optimized Cu Pillar Bump flip chip package design for ultralow k device application
Author
Chien-Te Feng ; Hsu, Meng-Kai ; Hsu, S.C. ; Chang, Wenge ; Su, Shih-Tang
Author_Institution
Marcrotech Technol. Inc., Hsinchu, Taiwan
fYear
2013
fDate
Feb. 27 2013-March 1 2013
Firstpage
15
Lastpage
24
Abstract
The demand for Cu Pillar Bump (CPB) has been significantly increased due to the fine pitch, high bandwidth, and high thermal performance requirement. However, the Cu pillar also has its own defect for the high peeling stress on the low K layer compare to the eutectic solder bump. To overcome the high peeling stress defect, optimize the CPB design is very important. This paper has three major topics using simulation results to analyze the silicon surface peeling stress. 1. The bump structure optimization, with the Cu pillar adhesion force on different material layers. 2. The solder joint condition impact. 3. The substrate material selection. Each topic has multiple design factors, with the CAE (Computer Aid Engineering) simulation result, the maximum silicon surface peeling stress point can be predicted, the bump and substrate structure can be optimized.
Keywords
adhesion; copper; elemental semiconductors; flip-chip devices; silicon; solders; thermal management (packaging); CAE; CPB design; Cu pillar adhesion force; Cu pillar bump; bump structure optimization; computer aid engineering; eutectic solder bump; flip chip package; silicon surface peeling stress; solder joint condition impact; substrate material selection; thermal performance; ultra low k device; Abstracts; Aluminum; Silicon compounds; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Packaging Materials (APM), 2013 IEEE International Symposium on
Conference_Location
Irvine, CA
ISSN
1550-5723
Print_ISBN
978-1-4673-6093-7
Electronic_ISBN
1550-5723
Type
conf
DOI
10.1109/ISAPM.2013.6510384
Filename
6510384
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