Title :
Virtual fab technology utility simulation and its application to 300mm CR facility design and energy reduction
Author :
Masuda, Toshikatsu ; Samata, Shuichi ; Mikata, Yuichi
Author_Institution :
Toshiba Corp. Semicond. Co., Yokohama
Abstract :
A new concept for facility design and electric power/energy analysis is introduced We developed the virtual fab simulator comprising of the lot flow simulator and the utility simulator called as FRS, fab resource simulator. With this simulator, we can estimate more accurate utility, and evaluate the reduction items. N2 facility size, for example, can be reduced by over 50% compared with the conventional method. The simulator also can be applied to analyzing the electric power consumptions of tools and reveals that the idle state power occupies approximately 1/3 of the total tool consumptions. Thus the virtual fab simulator is quite useful for efficient facility design and its analysis
Keywords :
CAD; energy conservation; integrated circuit manufacture; large scale integration; power consumption; production facilities; virtual manufacturing; 300 mm; CR facility design; N2 facility size; electric energy analysis; electric power analysis; electric power consumptions; energy reduction; fab resource simulator; idle state power; lot flow simulator; utility simulator; virtual fab simulator; virtual fab technology utility simulation; Analytical models; Chromium; Computer integrated manufacturing; Costs; Design methodology; Global warming; Large scale integration; Production; Safety; Semiconductor device modeling;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513285
