Title :
Study for Realizing Effective Direct Tool-to-Tool Delivery
Author :
Kondo, Hiroshi ; Harada, Mitsuru
Author_Institution :
Asyst Shinko Inc., Mie
Abstract :
Direct tool-to-tool delivery is one of technical topics for excellent fab performance. Automatic material handling system (AMHS) vendors supply unified OHT systems that can provide direct tool-to-tool delivery routes. But providing such routes is not sufficient to realize direct deliveries. The purpose of our study is to identify remaining issues required to realize direct tool-to-tool delivery. Our conclusions are: (1) AMHS cannot realize direct tool-to-tool delivery by itself without any degradation of fab throughput, and (2) effective algorithms for lot scheduling/dispatching and variability reduction of tool process rate are required to realize it without such degradation
Keywords :
dispatching; integrated circuit manufacture; integrated circuit technology; materials handling; scheduling; automatic material handling system vendors; direct tool-to-tool delivery; fab throughput; lot dispatching; lot scheduling; tool process rate; Degradation; Dispatching; Flowcharts; Job shop scheduling; Logic; Materials handling; Scheduling algorithm; Throughput; Vehicles; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513286
