Title :
Modeling practical methods of material storage in a 300 mm fab
Author :
Rust, Kristin ; Patel, Nipa ; Qu, Peng
Author_Institution :
Adv. Micro Devices, Austin, TX
Abstract :
The use of undertrack storage in a 300 mm fab is evaluated and compared to stocker storage using simulation model results. Description of the simulation model used, scenarios, and results are presented
Keywords :
industrial plants; integrated circuit manufacture; storage; 300 mm; material storage; simulation model; stocker storage; undertrack storage; Costs; Dynamic scheduling; Job shop scheduling; Manufacturing automation; Manufacturing processes; Material storage; Materials handling; Processor scheduling; Production facilities; Semiconductor device modeling;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513287
