Title :
New job classes for fully automated reticle and sorter dispatch
Author_Institution :
IBM Japan Ind. Solution Co. Ltd., Tokyo
Abstract :
The function to support automated lot dispatch, transport, performing process and data collection for fully automated fab operation has been enhanced following new 300 mm standards and requirements in Manufacturing Execution System (MES) along with relative components. However, fully automated reticle dispatch and dispatching FOUP to wafer sorter has not been implemented well. This paper introduces new job classes to support automated reticle dispatch and sorter dispatch
Keywords :
dispatching; integrated circuit manufacture; materials handling; production engineering computing; reticles; Manufacturing Execution System; automated data collection; automated lot dispatch; automated sorter dispatch; automated transport; fully automated reticle dispatch; job classes; wafer sorter; Automatic control; Computer integrated manufacturing; Dispatching; Logic; Manufacturing automation; Manufacturing industries; Manufacturing processes; Materials handling; Timing; Transportation;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513296
