DocumentCode
2089141
Title
New job classes for fully automated reticle and sorter dispatch
Author
Tamehiro, Ryuji
Author_Institution
IBM Japan Ind. Solution Co. Ltd., Tokyo
fYear
2005
fDate
13-15 Sept. 2005
Firstpage
59
Lastpage
62
Abstract
The function to support automated lot dispatch, transport, performing process and data collection for fully automated fab operation has been enhanced following new 300 mm standards and requirements in Manufacturing Execution System (MES) along with relative components. However, fully automated reticle dispatch and dispatching FOUP to wafer sorter has not been implemented well. This paper introduces new job classes to support automated reticle dispatch and sorter dispatch
Keywords
dispatching; integrated circuit manufacture; materials handling; production engineering computing; reticles; Manufacturing Execution System; automated data collection; automated lot dispatch; automated sorter dispatch; automated transport; fully automated reticle dispatch; job classes; wafer sorter; Automatic control; Computer integrated manufacturing; Dispatching; Logic; Manufacturing automation; Manufacturing industries; Manufacturing processes; Materials handling; Timing; Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location
San Jose, CA
Print_ISBN
0-7803-9143-8
Type
conf
DOI
10.1109/ISSM.2005.1513296
Filename
1513296
Link To Document