Title :
Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs
Author :
Christopher, Julie ; Kuhl, Michael E. ; Hirschman, Karl
Author_Institution :
Rochester Inst. of Technol., NY
Abstract :
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control policies to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact
Keywords :
design; dispatching; integrated circuit manufacture; materials handling; production control; production engineering computing; SEMATECH fab data; automated material handling systems; design; dispatching rules; machine dispatching rules; material handling policies; processing tools; production control policies; semiconductor fabs; semiconductor manufacturing; simulation analysis; vehicle dispatching rules; Analytical models; Design optimization; Dispatching; Materials handling; Performance analysis; Performance evaluation; Production control; Semiconductor device manufacture; Testing; Vehicles;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513302
