Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

Author

Christopher, Julie ; Kuhl, Michael E. ; Hirschman, Karl

Author_Institution

Rochester Inst. of Technol., NY

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

84

Lastpage

87

Abstract

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control policies to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact

Keywords

design; dispatching; integrated circuit manufacture; materials handling; production control; production engineering computing; SEMATECH fab data; automated material handling systems; design; dispatching rules; machine dispatching rules; material handling policies; processing tools; production control policies; semiconductor fabs; semiconductor manufacturing; simulation analysis; vehicle dispatching rules; Analytical models; Design optimization; Dispatching; Materials handling; Performance analysis; Performance evaluation; Production control; Semiconductor device manufacture; Testing; Vehicles;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513302

Filename

1513302