Title :
Linearity control system to maximize bottleneck in a rich product-mix foundry wafer fab
Author :
Chan, Chih Ming ; Subramaniam, Muralitharan ; Chakravarthi, Madan Mohan
Author_Institution :
Chartered Semicond. Manuf. Ltd
Abstract :
A production control strategy to maximize WlP arrival to bottleneck tool is being implemented in a foundry wafer fab. The technology spectrum and device mix is extremely wide that resulted in a non-linear arrival rate to the bottleneck tool at the back-end of line (BEOL). A production strategy to linearise the WlP into this bottleneck was studied and implemented through the shop-floor dispatch system. The results show 45% improvement to the original plan arrival rate
Keywords :
foundries; integrated circuit manufacture; production control; work in progress; WlP arrival; back-end of line; bottleneck maximization; device mix; linearity control system; plan arrival rate; production control; rich product-mix foundry wafer fab; shop-floor dispatch system; technology spectrum; Control systems; Foundries; Intrusion detection; Linearity; Manufacturing; Production control; Production systems; Semiconductor device manufacture; State estimation; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513303
