Title :
Integrated process and inspection/metrology capacity planning
Author :
Gudmundsson, Dadi ; Shanthikumar, J. George
Author_Institution :
Dept. of IEOR, California Univ., Berkeley, CA
Abstract :
Discrete event simulation is used to integrate process and inspection/metrology capacity models. This allows fab yield to be estimated for different process and inspection/metrology capacity choices. The importance of this integration is demonstrated through diverse experiments that reveal how excursion detecting inspection/metrology affects critical parameters in process tool capacity models and vice versa. One experiment shows a new method of quantifying the yield benefits of automated material handling systems (AMHS)
Keywords :
capacity planning (manufacturing); discrete event simulation; inspection; integrated circuit measurement; integrated circuit yield; materials handling; production engineering computing; automated material handling systems; discrete event simulation; inspection capacity planning; metrology capacity planning; process capacity planning; process tool capacity models; Capacity planning; Discrete event simulation; Inspection; Materials handling; Mathematical model; Metrology; Preventive maintenance; Semiconductor devices; Throughput; Yield estimation;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513308
