Integrated process and inspection/metrology capacity planning

Author

Gudmundsson, Dadi ; Shanthikumar, J. George

Author_Institution

Dept. of IEOR, California Univ., Berkeley, CA

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

105

Lastpage

108

Abstract

Discrete event simulation is used to integrate process and inspection/metrology capacity models. This allows fab yield to be estimated for different process and inspection/metrology capacity choices. The importance of this integration is demonstrated through diverse experiments that reveal how excursion detecting inspection/metrology affects critical parameters in process tool capacity models and vice versa. One experiment shows a new method of quantifying the yield benefits of automated material handling systems (AMHS)

Keywords

capacity planning (manufacturing); discrete event simulation; inspection; integrated circuit measurement; integrated circuit yield; materials handling; production engineering computing; automated material handling systems; discrete event simulation; inspection capacity planning; metrology capacity planning; process capacity planning; process tool capacity models; Capacity planning; Discrete event simulation; Inspection; Materials handling; Mathematical model; Metrology; Preventive maintenance; Semiconductor devices; Throughput; Yield estimation;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513308

Filename

1513308