A best known methodology for transfer machine metrics from technology development facility to high volume manufacturing facility

Author

Segal, Tomer ; Powell, John ; Assaf, Orit

Author_Institution

Intel Corp., Lachish

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

109

Lastpage

112

Abstract

In advanced semi-conductor manufacturing capital equipment depreciation drives the largest cost in producing products. Therefore, it is critical to have the exact amount of machines (or tools). Several parameters dictate machine quantities for a given technology launch to high volume manufacturing, such as: availability, utilization, run rate, synergies with other technologies and time factors. These machine parameters, also known as "machine metrics", must be optimized. This paper presents a best known methodology to transfer the machine metrics from technology development (TD) site to high volume manufacturing (HVM) site in order to minimize the changes in tools\´ quantities forecast

Keywords

capacity planning (manufacturing); integrated circuit manufacture; production equipment; production facilities; advanced semiconductor manufacturing; capital equipment depreciation; high volume manufacturing facility; machine availability; machine run rate; machine technological synergy; machine time factors; machine utilization; technology development facility; transfer machine metrics; Availability; Costs; Manufacturing; Mathematical model; Performance evaluation; Predictive models; Production; Semiconductor device modeling; Testing; Time factors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513309

Filename

1513309