Title :
Capacity forecast model for control and dummy wafers
Author :
Liou, Chuen-Shiuan ; Lin, TK ; Tu, Bruce ; Chang, Alan
Author_Institution :
Taiwan Semicond. Manuf. Co., Ltd, Hsin-Chu
Abstract :
Tool capacity planning is a frequent task in semiconductor wafer fabrication plants. Various control and dummy wafers (C/D wafers) used to enhance product quality and process stability become increasingly important to fab performance. The capacity required to fabricate complex C/D wafers must be taken into consideration in the tool investment plan. Inaccurate capacity forecast of C/D wafers results in tool investment surplus or shortage. This paper describes a successful methodology to establish capacity forecast model for C/D wafers. The proposed model presents the solution to be explored effectively and has demonstrated a capability superior to the current planning method in wafer fabrication plants
Keywords :
capacity planning (manufacturing); industrial plants; integrated circuit manufacture; machine tools; capacity forecast model; control wafers; dummy wafers; process stability; product quality; semiconductor wafer fabrication plants; tool capacity planning; tool investment plan; Capacity planning; Costs; Fabrication; Foundries; Investments; Predictive models; Recycling; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513313