Title :
Different channel-spacing DFB laser array fabricated by SAG after optimization
Author :
Can Zhang ; Li Ma ; Song Liang ; Baojun Wang ; Hongliang Zhu ; Wei Wang
Author_Institution :
Key Lab. of Semicond. Mater., Inst. of Semicond., Beijing, China
Abstract :
Selective area growth has been performed to fabricate monolithically integrated DFB laser array with different channel spacings by adjusting the mask width and the thickness of waveguide layer. The DFB laser array with an average channel spacing 0.69nm and 1.50nm is demonstrated respectively.
Keywords :
channel spacing; distributed feedback lasers; integrated optoelectronics; masks; optical fabrication; quantum well lasers; semiconductor laser arrays; waveguide lasers; SAG; average channel spacing; mask width; monolithically integrated DFB laser array; optimization; selective area growth; waveguide layer thickness;
Conference_Titel :
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-6274-0