DocumentCode
2090531
Title
Unsupervised algorithms for the automatic classification of EWS maps: a comparison
Author
Di Palma, Federico ; De Nicolao, Giuseppe ; Donzelli, Oliver M. ; Miraglia, Guido
Author_Institution
Pavia Univ., Italy
fYear
2005
fDate
13-15 Sept. 2005
Firstpage
253
Lastpage
256
Abstract
Recently, it has been shown that the classification of electrical wafer sorting failure maps can be performed by means of unsupervised methods. In this work four different unsupervised methods are compared: SOM, K-means, neural gas, and an expectation maximization. The algorithms are compared using a benchmark based on a probabilistic model. The performance of the classification is assessed by means of an new index, called index-F, based on the knowledge of the real classification. Moreover it is studied the correlation between the proposed index and the following indexes: CH-index, D-index, I-index and average likelihood.
Keywords
failure analysis; integrated circuit testing; optimisation; pattern classification; production engineering computing; self-organising feature maps; unsupervised learning; CH-index; D-index; I-index; K-means; SOM; automatic classification; average likelihood; electrical wafer sorting; expectation maximization; failure maps; index-F; neural gas; probabilistic model; self organizing map; unsupervised algorithms; Clustering algorithms; Failure analysis; History; Humans; Pattern analysis; Semiconductor device modeling; Shape; Sorting; Testing; Visualization;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Print_ISBN
0-7803-9143-8
Type
conf
DOI
10.1109/ISSM.2005.1513349
Filename
1513349
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