• DocumentCode
    2090531
  • Title

    Unsupervised algorithms for the automatic classification of EWS maps: a comparison

  • Author

    Di Palma, Federico ; De Nicolao, Giuseppe ; Donzelli, Oliver M. ; Miraglia, Guido

  • Author_Institution
    Pavia Univ., Italy
  • fYear
    2005
  • fDate
    13-15 Sept. 2005
  • Firstpage
    253
  • Lastpage
    256
  • Abstract
    Recently, it has been shown that the classification of electrical wafer sorting failure maps can be performed by means of unsupervised methods. In this work four different unsupervised methods are compared: SOM, K-means, neural gas, and an expectation maximization. The algorithms are compared using a benchmark based on a probabilistic model. The performance of the classification is assessed by means of an new index, called index-F, based on the knowledge of the real classification. Moreover it is studied the correlation between the proposed index and the following indexes: CH-index, D-index, I-index and average likelihood.
  • Keywords
    failure analysis; integrated circuit testing; optimisation; pattern classification; production engineering computing; self-organising feature maps; unsupervised learning; CH-index; D-index; I-index; K-means; SOM; automatic classification; average likelihood; electrical wafer sorting; expectation maximization; failure maps; index-F; neural gas; probabilistic model; self organizing map; unsupervised algorithms; Clustering algorithms; Failure analysis; History; Humans; Pattern analysis; Semiconductor device modeling; Shape; Sorting; Testing; Visualization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
  • Print_ISBN
    0-7803-9143-8
  • Type

    conf

  • DOI
    10.1109/ISSM.2005.1513349
  • Filename
    1513349