Title :
Modeling and analysis of stocker system in semiconductor and LCD fab
Author :
Jang, Young Jae ; Choi, Gi Han ; Kim, Sun Il
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA
Abstract :
In this paper, we present the modeling method and analyze of the stocker system, which used to store the work-in-process in a semiconductor or liquid crystal display fab. The decomposition method is a mathematical technique to analyze the behavior of a production system using queueing network model. In analyzing the performance of the stocker system, we apply the decomposition to the stocker model. The main purpose of this paper is to demonstrate the modeling approach in analyzing the stocker system. Furthermore, we want to present the decomposition method applied to the stocker system analysis. Since the analytical approach in measuring the performance of the stocker system we present in this paper dose not require a lot of computation time, this method can be used by stocker system designers or fab layout designers during concept design stages
Keywords :
design; integrated circuit manufacture; liquid crystal displays; manufacturing systems; queueing theory; work in progress; decomposition method; fab layout designers; liquid crystal display fab; production system behavior; queueing network model; semiconductor fab; stocker system designers; stocker system model; work-in-process; Analytical models; Manufacturing systems; Materials handling; Mathematical model; Orbital robotics; Performance analysis; Production systems; Queueing analysis; Robotics and automation; Sun;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513355