Title :
Analytical models of vehicle-based automated material handling systems in semiconductor fabs
Author :
Nazzal, Dima ; McGinnis, Leon F.
Author_Institution :
Sch. of Ind. & Syst. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
This research explores analytical models useful in the design of vehicle-based automated material handling systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the throughput and move request delay. The analysis approach is based on queuing network models, but taking into account details of the operation of the AMHS. We analyze the vehicles movement in the system using a Markov chain. This analysis provides the essential parameters such as the blocking probabilities in order to estimate the performance measures. A numerical example is provided to demonstrate and validate the queuing model
Keywords :
Markov processes; design; integrated circuit manufacture; materials handling; probability; queueing theory; Markov chain; automated material handling systems; blocking probabilities; move request delay; performance measure estimation; queuing network models; semiconductor fabs; Analytical models; Delay estimation; Manufacturing automation; Materials handling; Performance analysis; Queueing analysis; Semiconductor device manufacture; Throughput; Vehicles; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513358
