DocumentCode
2090937
Title
Polarization manipulation holographic lithography by single refracting prism
Author
Man Wu ; Yi Xu ; Xiaoxu Lu ; Sheng Lan ; Lijun Wu
Author_Institution
Sch. for Inf. & Optoelectron. Sci. & Eng., South China Normal Univ., Guangzhou, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
8
Abstract
We propose a simple but effective strategy for polarization manipulation holographic lithography by single refractive prism. By tuning the polarization of single laser beam, we simply obtain a pill shape interference pattern where multiple modulated beams are needed in conventional holography lithography. Fabrication of large area pill shape two-dimensional polymer photonic crystals template using one beam and one shoot holography lithography is shown as an example. This integrated fabrication technique, for example, can release the crucial stability restrictions imposed on the multiple beams holography lithography.
Keywords
holography; lithography; optical fabrication; optical prisms; photonic crystals; integrated fabrication technique; pill shape interference pattern; polarization manipulation holographic lithography; polymer photonic crystal template; single laser beam; single refracting prism; single refractive prism;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6510687
Link To Document