• DocumentCode
    2090937
  • Title

    Polarization manipulation holographic lithography by single refracting prism

  • Author

    Man Wu ; Yi Xu ; Xiaoxu Lu ; Sheng Lan ; Lijun Wu

  • Author_Institution
    Sch. for Inf. & Optoelectron. Sci. & Eng., South China Normal Univ., Guangzhou, China
  • fYear
    2012
  • fDate
    7-10 Nov. 2012
  • Firstpage
    1
  • Lastpage
    8
  • Abstract
    We propose a simple but effective strategy for polarization manipulation holographic lithography by single refractive prism. By tuning the polarization of single laser beam, we simply obtain a pill shape interference pattern where multiple modulated beams are needed in conventional holography lithography. Fabrication of large area pill shape two-dimensional polymer photonic crystals template using one beam and one shoot holography lithography is shown as an example. This integrated fabrication technique, for example, can release the crucial stability restrictions imposed on the multiple beams holography lithography.
  • Keywords
    holography; lithography; optical fabrication; optical prisms; photonic crystals; integrated fabrication technique; pill shape interference pattern; polarization manipulation holographic lithography; polymer photonic crystal template; single laser beam; single refracting prism; single refractive prism;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Communications and Photonics Conference (ACP), 2012 Asia
  • Conference_Location
    Guangzhou
  • ISSN
    2162-108X
  • Print_ISBN
    978-1-4673-6274-0
  • Type

    conf

  • Filename
    6510687