Semiconductor production schedule check and correction technique through mobile agent system

Author

Fujinaga, Kiyohisa ; Takazawa, Gaku ; Sato, Goh

Author_Institution

Hokkaido Inst. of Technol., Sapporo

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

335

Lastpage

338

Abstract

A novel agent system that can check and correct machine schedules in semiconductor production was proposed The system consists of stationary machine agents that control their machine schedules, mobile agents that move between the machines, machine schedule files described in XML, and a time buffer stage where lots wait to keep the machine schedules. The real-time scheduling system proceeds according to the rules of mobile agent generation, machine scheduling, and machine and mobile agents collaboration. The system was confirmed through the computer simulation, supposing a small-scaled semiconductor production line

Keywords

XML; control engineering computing; integrated circuit manufacture; mobile agents; multi-agent systems; production control; production engineering computing; scheduling; XML; computer simulation; machine collaboration; machine schedules; mobile agent system; mobile agents; mobile agents collaboration; real-time scheduling system; schedule check technique; schedule correction technique; semiconductor production schedule; stationary machine agents; time buffer stage; Computer simulation; Computerized monitoring; Condition monitoring; Control systems; Mobile agents; Processor scheduling; Production facilities; Production systems; Real time systems; XML;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513371

Filename

1513371